Fraunhofer Group for Microelectronics in cooperation with the Leibniz institutes IHP and FBH
Fraunhofer Group for Microelectronics in cooperation with the Leibniz institutes IHP and FBH

© Fraunhofer EMFT

Micropumps

Piezomic pumps for application-specific micro-dosing solutions

Piezoelectrically driven micropumps are at the heart of microdispensing systems. Particularly in laboratory and medical technology, the precise metering of minute quantities of liquids or gases is often crucial for safety reasons. This calls for efficient and reliable yet economical microdispensing systems.

The piezoelectrically driven stainless steel micro membrane pumps developed at Fraunhofer EMFT enable precise dosing rates of up to 50 ml/min with air and up to 16 ml/min with water. The micropump's areas of application in the field of medical technology range from infusion and drug dosing systems to local harmful pressure therapies for treating chronic wounds. In the future, however, they will also be used as active implants for various medical applications.

The challenges are, on the one hand, to ensure long-term dosing stability without a failure of the micropump and, on the other hand, to reduce the operating voltage of the pump. Using a multilayer technology could significantly reduce the voltage required to operate the pump.

 

More information can also be found directly on the page of the FMD Institute Fraunhofer EMFT

 

Micropumps for gas sensors

© Fraunhofer EMFT

Many smartphones already have sensors for environmental parameters such as CO2, humidity, or temperature.

Fraunhofer EMFT uses a piezoelectrically driven silicon micro membrane pump to increase the effectiveness of such sensor systems.

This small pump, which supplies the sensors in the mobile device with ambient air, can significantly shorten the sensors' response time and thus improve the measurement results. Its small size and low power consumption make applications possible even on mobile devices.

Fraunhofer EMFT develops customized piezoelectric micropumps and their control electronics for the volumetric pumping of gases and application-specific system integration of sensors and actuators.

The main focus of R&D activities in silicon micropumps is on their further miniaturization and the industrialization of manufacturing.

The aim is to significantly reduce manufacturing costs and thus facilitate access to mass markets. The world's smallest silicon micromembrane pump, with dimensions of 3.5 x 3.5 x 0.6 mm3, was developed at Fraunhofer EMFT.

 

More information can also be found directly on the page of the FMD Institute Fraunhofer EMFT