Fraunhofer Group for Microelectronics in cooperation with the Leibniz institutes IHP and FBHComponents
- Wavelength-specific light sources and associated driver electronics
- LASER diodes at 1.2 µm
- AlGaN-based LASER diodes around 0.25 µm
- LED (UV-B and UV-C)
- InP-based terahertz sources (optical) for spectroscopy between 100 GHz - 5 THz
- Spectral broadband tunable quantum cascade lasers
- Narrowband and low-noise VECSEL (2-3µm)
- Wavelength specific detectors
- Silicon based photodiodes and matrix detectors
- MEMS-based micro bolometers (IR)
- Single-photon avalanche diodes (SPADs)
- InGaAs detectors (SWIR)
- AlGaN detectors (UV)
- Type II Super Lattice (T2SL) detectors (MWIR-LWIR)
- SiC-based detectors in the UV range
- CMOS-based color and/or polarization sensors
Miniaturized components for spectral analytical systems for spectral sensors and spectroscopy (VIS, SWIR, MWIR, LWIR) & for spectral imaging sensors and imaging spectroscopy (VIS, SWIR, MWIR, LWIR)
- MEMS-based filters for IR & VIS, e.g. Fabry-Pérot interferometer and chopper
- Tunable filters for quantum cascade lasers and portable Raman systems
- Scanner modules based on micromirrors
- Plasmonic filters / nanospectral color filters in CMOS
Technological Highlights
Components for spectroscopy and multisensor technology
Spectrally Tunable Filters
- Design, fabrication and characterization of nanostructures as part of MOEMS for IR filters
- Analysis of wafers with components on 300 mm - wafer prober, precise alignment of optical and IR probes with simultaneous DC and RF probing
Applications
- Infrared spectroscopy for determination of substance concentrations and compositions
- Analysis of gases, liquids and solids
Cooperations and projects
InfraTec Gmbh - Development of tunable IR filters (Detector with tunable Fabry-Pérot-Filter (FPF)
Further Information
Spectral Technologies and Systems
Diode lasers for sensors and analytics
- Development of diode lasers specifically tailored to applications in sensors and analytics
- Focus on Raman - e.g. Shifted Excitation Raman Difference Spectroscopy (SERDS)
- Spectrally narrowband lasers and wavelength-stabilized laser systems
Applications
- Raman, fluorescence and absorption spectroscopy for in situ material characterization in e.g. safety engineering, biological, medical, food or pharmaceutical inspection
- As seed laser for high power lasers (e.g. for LiDAR systems)
Further information
External wavelength stabilized 445 nm GaN diode laser
THz detectors for spectroscopy
Ready to use THz detector in housing
- Based on GaN-HEMT MMIC technology, which allows the detection of
- signals above the transit frequency
- High sensitivity, fast response, high broadband performance
- Integration of GaN-HEMT devices in antennas (patented design)
- Aimed at the development of THz camera systems and scanners
Applications
- THz spectroscopy
Further information
Joint Lab THz Components & Systems
Publications
M. Bauer, et al.: "A high-sensitivity AlGaN/GaN HEMT Terahertz detector with integrated broadband bow-tie antenna," IEEE Trans. on Terahertz Science and Technology, Vol. 9, No. 4, pp. 430-444, July 2019,
DOI: 10.1109/TTHZ.2019.2917782
SiGe BiCMOS technology for THz devices.
- THz devices based on IHP SiGe BiCMOS enabling technology, including applications in sensing.
- THz sources for use in spectroscopic techniques.
Applications
- Use in various communication, measurement and ranging systems
- Gas analysis
Cooperations and projects
Publications
T. Zimmer et al. :“SiGe HBTs and BiCMOS Technology for Present and Future Millimeter-Wave Systems“
IEEE Journal of Microwaves 1(1), 288 (2021). DOI: 10.1109/JMW.2020.3031831
Link: https://ieeexplore.ieee.org/document/9318746
N. Rothbart et al.: „A Compact Circular Multipass Cell for Millimeter-Wave/Terahertz Gas Spectroscopy“; IEEE Transactions on Terahertz Science and Technology 10(1), 9 (2020). DOI: 10.1109/TTHZ.2019.2950123 Link: https://ieeexplore.ieee.org/document/8884743
Image of a circular multipass sensing cell for gas sensing. The path of the beams is schematically shown in red.
Quasistatic MEMS mirror
Quasistatic micro-mirror chips with piezoelectric (AlN) actuation.
Quasistatic piezoelectric (AlN) driven micromirror with four drive electrodes. This mirror can be operated in both tilt mode and stroke mode (OPD ~ 400 µm).
- Piezo-electric (AlScN) MEMS mirror,
- Translational motion demonstrated / simulated (linear and quasi-static)
- OPD ~ 400 µm = 0.04 cm
- Spectral resolution = 25 cm-1
Applications
- Infrared spectroscopy (FTIR)
- Application e.g. in the Michelson interferometer as part of the FTIR, where the double stroke of the translation mirror in air represents the Optical Path Difference (OPD) and is used as a quality feature (high OPD means high spectral resolving power)
- Application e.g. in the Michelson interferometer as part of the FTIR, where the double stroke of the translation mirror in air represents the Optical Path Difference (OPD) and is used as a quality feature (high OPD means high spectral resolving power)
Cooperations and Projects
MELINDA (FhG internal PREPARE funded project)
Publications
S. Gu-Stoppel et al., “A highly linear piezoelectric quasi-static MEMS mirror with mechanical tilt angles of larger than 10°,” in MOEMS and Miniaturized Systems XVIII, 2019, vol. 10931, p. 1093102, doi: 10.1117/12.2509577
S. Gu-Stoppel et al.: A triple-wafer-bonded AlScN driven quasi-static MEMS mirror with high linearity and large tilt angles; Proc. SPIE 11293, MOEMS and Miniaturized Systems XIX, 1129304 (28 February 2020); doi: 10.1117/12.2542800
S. Gu-Stoppel et al.: A designing and manufacturing platform for AlScN based highly linear quasi-static MEMS mirrors with large optical apertures; Proceedings Volume 11697, MOEMS and Miniaturized Systems XX; 116970F (2021) doi: 10.1117/12.2583399
Compact "chip-size" spectrometers
- Application-specific optical sensors and sensor systems CMOS technology, e.g.
- Compact "chip-size" spectrometers with plasmonic "on-chip" filters.
- Various designs - 12, 30, 100, up to 1000 spectral channels
- Many spectral channels in smallest space
- High technological maturity ("silicon proven")
Applications
- Analysis of gases and liquids
- Machine vision for quality control, sorting and smart farming
- Color control for LED lighting systems
- Driver assistance systems in the automotive sector
Cooperations and projects
Further information
www.iis.fraunhofer.de/en/ff/sse/sensor-solutions/optischesensorik.html
CSPAD αlpha photodetector for spectroscopy
CSPAD αlpha photodetector.
- Enables new forms of integration of SPADs into CMOS tecnology
- Single photon sensitive sensor matrix with 64x48 pixels and coincidence logic for background light suppression
- new integration forms of single photon avalanche diodes (SPAD) in CMOS
Applications
- Spectroscopy
- Quantum sensing
Further information
Vision-Systems-on-Chip (VSoC) for optical measurement, inspection or control tasks
- Software-programmable image sensors based on a novel processing architecture
- High frame rates and short response times at low power consumption
Applications
- Optical inspection systems in industry
Further information
Vision-System-on-Chip
3D-glass micromaching
Detail of a glass wafer which consists entirely of a glass lens array: The lenses have a diameter of 2 mm.
Section of an 8" glass wafer containing mirrors with an aperture diameter of 8 mm for an infrared gas sensor system. The glass mirrors were additionally coated with gold for this application.
- Glass flow technology, e.g. for the development of optics for IR cameras
- Wafer-level optics kit for VIS, NIR and FIR
- Materials: CTE(Glass) = CTE(Si)
Applications
- Micro lens arrays
- Spherical and aspherical lenses and mirrors
- Prism plates
- Micro-optical bench
Cooperations and projects
Further information
Microbolometer technology for infrared sensor technology
- MOEMS:Microspectrometer
- compact NIR spectrometer based on scanning grating technology
- Microscanning mirror with diffraction grating
Applications
- Analysis of substances in the near infrared range
- Identity testing of starting materials in the pharmacy - "Apo-Ident"
Cooperations and projects
Further information
www.ipms.fraunhofer.de/de/press-media/press/2016/2016-05-09.html (information in German)l
Scanning Grating Spectrometer – as big as a sugar cube.
Manipulatable interference switch
Triggered (brown) and untriggered (yellow) interference switch pixels in a transmission display with microlens array.
- 2D matrix
- Electrostatic or piezoelectric (AlScN)
- Basis for an array spectrometer, incl. 2D microlens array for beam focusing
Applications
- Originally used in endoscopy for pattern projection to measure surfaces in cavities
- Further possible application: Fabry-Pérot interferometer array for spatially resolved material analysis.
Cooperations and projects
- Project MicroEnd, BMBF, FKZ 16SV1222
Publications
T. Knieling et al.: Electrostatic actuated optical Fabry-Pérot switches in passive matrix displays, Proc. SPIE 5348, MOEMS Display and Imaging Systems II, (24 January 2004); doi: 10.1117/12.523344
T. Knieling et al.: Characteristics and electrical addressing of optical Fabry-Pérot displays, Proc. SPIE 5875, Novel Optical Systems Design and Optimization VIII, 58750K (31 August 2005); doi: 10.1117/12.615703